The US also wants Japanese companies to limit exports to China of specialised chemicals critical for manufacturing chips, including photoresist, they said. Japan is home to several leaders in photoresist, including JSR and Shin-Etsu Chemical.

Tokyo and The Hague have responded coolly to Washington’s latest push, arguing that they want to assess the impact of their current curbs before considering tighter measures, some of the people said. US Commerce Department officials raised the issue in Tokyo during a meeting on export controls last month, according to one of the people.

Representatives at ASML, the Dutch trade ministry and Japan’s Ministry of Economy, Trade and Industry declined to comment. In Washington, the National Security Council and the US Commerce Department also declined to comment.

The Biden administration has taken aim at China’s semiconductor industry since 2022, imposing sweeping controls on the export of advanced chip-making machines and sophisticated semiconductors like those used to develop and train artificial intelligence systems. Japan and the Netherlands, the two key countries that develop and supply chip-making equipment, joined the US effort last year.

But holes remain, particularly in the ability of Japanese and Dutch engineers to continue doing some equipment repairs, and in the flow of spare parts that are used in semiconductor manufacturing equipment.

US Commerce Secretary Gina Raimondo has vowed to take the “strongest possible” action following the Huawei breakthrough, while Republican lawmakers have called for a complete block of Huawei and its chip-making partner Semiconductor Manufacturing International Corp’s access to US technology.

The latest US push includes an effort to tighten existing limits. ASML needs a licence to service and repair restricted gear in China, but the Netherlands has been somewhat lax about approval, according to one of the people. The US wants the Netherlands to take a more stringent approach, the person said.

The US also wants to draw more countries into its export-control blockade. The Biden administration is trying to bring Germany and South Korea into an agreement that already includes Japan and the Netherlands, since all four countries are home to key firms in the semiconductor supply chain, according to the people.

For Germany, one of the critical players is Carl Zeiss, a specialised glassmaker that supplies ASML with the optical components necessary for advanced chip production. The US wants Germany to get Zeiss to pull back from shipping such components to China, the people said.

Dutch officials also hope that Germany will join the export control group, according to the people, and the Biden administration is pushing for an agreement before the G7 summit in June.

Berlin last year considered whether to restrict exports of chip chemicals to China, but Chancellor Olaf Scholz, who is slated to visit China in April, has not yet taken a stance on the issue, according to the person. Scholz’s deputy Robert Habeck, meanwhile, is visiting the US this week and will meet Raimondo during his trip.

In addition, the US has held talks with South Korea on chip export controls, given the country’s leading role in producing semiconductors and supplying spare parts for chip-making equipment.

The two countries launched a structured dialogue in February after US officials asked their counterparts in Seoul to join the multilateral group last year, according to some of the people.